Iwaki FA Series Bellows Pumps

The right pump for the right job. The FA Series bellows pump addresses low flow and high flow requirements at low to medium temperatures (5 to 100°C). The FA-2E pump is for precise chemical delivery for flow rates up to 0.5 gpm (2 L/min). The FA-40 pump is excellent for applications requiring high volume flow, such as large wafer processing, delivering up to 11.6 gpm (50 L/min). The FA-40 is constructed vertically to optimize precious cabinet space.

All liquid ends are constructed of fluoropolymers for purity and corrosion resistance. The PTFE bellows are rugged and proven to withstand long term continuous operation and high pressure resistance better than any other pump.

Leak detection and drive sensing enhance the reliability and safety of these pneumatic pumps.

SUPPORT DOCUMENTS General Brochure

 

RELATED LINKS Literature Factory Website