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Iwaki
FS Series Bellows Pumps
Iwaki
America’s FS is a compact, all-temperature rated, low-cost,
air-driven, bellows pump series designed for the semiconductor
industry, chemical delivery or recirculation. This pump handles
high temperature nitride etch and piranha etch applications with
ease. FS features intelligent drive technology and leak sensing,
with a significant cost savings over previous models, and a 2-year
warranty.
Iwaki America’s FS is rated for liquid temperatures ranging from
5° to 180°C with discharge pressures up to 73 psi, making it the
perfect pump for wet process tools, cleaning and chemical feed
applications. Utilizing stroke rates up to 240 spm, FS is able to
produce up to 50% higher flow rates in a significantly smaller
space.
FS has a contamination-free design; all liquid contact parts are
made of PTFE/PFA. The anti-torsion air chamber design eliminates
the need for retorquing connecting rods. The intelligent sensor
drive system of Iwaki America’s FS design uses proximity
switches and an external solenoid valve allowing the pump
operation to be easily controlled and monitored.
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General
Brochure
