Iwaki FS Series

High Purity Pumps

Iwaki America provides fluid handling solutions to the Semiconductor equipment industry. High purity metering pumps are provided for on-tool chemical generation and chemical concentration management. As the leader in surface preparation recirculation pumps, our high purity pumps are the choice for CMP, etch/strip, and copper solution handling.

Series Include: FF/FF-H, FA, FW/FW-H, FS, FLP-60W, CFD

For additional information: Manufacturer's Website open_in_new


Flow Rates to22.7 GPM
Pressures to71 PSI (164' TDH)
Temperatures to356° F

Options & Accessories

Filter / Regulators
Master Pneumatic filter/regulators are used with 'lube-free' air operated double diaphragm pumps. Use these to filter the incoming air and regulate the speed of your pump. Visit our retail ...
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