High Purity PumpsIwaki America provides fluid handling solutions to the Semiconductor equipment industry. High purity metering pumps are provided for on-tool chemical generation and chemical concentration management. As the leader in surface preparation recirculation pumps, our high purity pumps are the choice for CMP, etch/strip, and copper solution handling.
Series Include: FF/FF-H, FA, FW/FW-H, FS, FLP-60W, CFD
For additional information: Manufacturer's Website
|Flow Rates to||22.7 GPM|
|Pressures to||71 PSI (164' TDH)|
|Temperatures to||356° F|
Options & Accessories
Filter / Regulators
Master Pneumatic filter/regulators are used with 'lube-free' air operated double diaphragm pumps. Use these to filter the incoming air and regulate the speed of your pump. Visit our r...